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Canon g-line stepper
Align & Expose Process wafer handler 6in. type 2/reticle size 5in. type 2
CTC Temp: Lens: 22.5Deg.C-Booth: 21.0Deg.C-Stage: Deg. 23.0C
Features: 20mm-square projection screen size NA (numerical aperture)-0.52
Resolution exposure-0.5 micron
Manuals: Operation-Maintenance-Parts catalogue are available.
Main body plus reticle changer and illuminator
HP Color monitor keyboard and printer
For more information and pictures on this machine follow the link below.
http:// /equip_owned/1211.html
